Guide to Characteristics and Characterization of Semiconductor Surfaces
English | 2025 | ISBN: 9811254818 | 218 Pages | PDF (True) | 9 MB
English | 2025 | ISBN: 9811254818 | 218 Pages | PDF (True) | 9 MB
This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features.